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Scandium Sputtering Targets

ST0184 Scandium Oxide Sputtering Target, Sc2O3

The scandium oxide sputtering target is available in various forms, purities, sizes, and prices. Stanford Advanced Materials (SAM) offers high-quality scandium oxide sputter targets at the most competitive prices.

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Scandium Oxide Sputtering Target Description

The Scandium Oxide Sputtering Target is composed of high-purity Scandium Oxide (Sc₂O₃) with a purity typically exceeding 99.9%. Available in cylindrical or planar shapes tailored to customer specifications, this target is employed in Physical Vapor Deposition (PVD) processes for thin film deposition. Compatible with various substrates like glass, silicon, and metals, it finds applications in electronic and optical fields, contributing to the production of thin films for semiconductor devices and optical coatings. With a polished surface to ensure uniform film deposition, this sputtering target is a crucial component in the creation of advanced technologies, leveraging the high refractive index of Scandium Oxide for optical applications. Manufacturers offer customized solutions to meet diverse industry requirements.

Scandium Oxide Sputtering Target Specifications

Compound Formula Sc2O3
Molecular Weight 137.91
Appearance White
Melting Point 2,485° C
Density 3860 kg/m-3
Available Sizes Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

Scandium Oxide Sputtering Target Applications

  • Semiconductor Devices: Facilitates thin film deposition for advanced semiconductor components.
  • Optical Coatings: Essential for creating transparent and high-index coatings on lenses and optical devices.
  • Advanced Materials: Integral in research and development for the development of cutting-edge technologies, utilizing Physical Vapor Deposition (PVD) processes.
  • Diverse R&D: Enables exploration in thin film technology and materials science, contributing to various research initiatives.

Scandium Oxide Sputtering Target Packaging

Our scandium oxide sputtering target is tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.


Chemical Formula


Catalog Number


CAS Number



99.9%, 99.95%, 99.99%


Discs, Plates, Column Targets, Step Targets, Custom-made


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